Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11612979 | Polishing pad | Arisa Kuroda | 2023-03-28 |
| 9994739 | Polishing liquid and method of polishing SiC substrate | Takeshi Sato | 2018-06-12 |
| 9761454 | Method of polishing SiC substrate | Takeshi Sato | 2017-09-12 |
| 6976908 | Polishing head and polishing apparatus | Takayuki Masunaga, Shinobu Oofuchi, Hiromichi Isogai | 2005-12-20 |
| 6668662 | Viscoelasticity measuring device | Hiromichi Isogai, Takayuki Masunaga | 2003-12-30 |
| 6517422 | Polishing apparatus and method thereof | Takao Sakamoto, Shinya Kawamoto, Katsuaki Kotari, Masayoshi Saitou, Yoshihiko Hoshi | 2003-02-11 |