Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8873151 | Illumination system for a microlithgraphic exposure apparatus | Alexander Sohmer, Aurelian Dodoc, Heiko Feldmann, Wilhelm Ulrich, Gerhard Fuerter +2 more | 2014-10-28 |