Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531272 | Pupil stop for an illumination optical unit of a metrology system | — | 2022-12-20 |
| 10054860 | Projection exposure apparatus with optimized adjustment possibility | Boris Bittner, Holger Walter | 2018-08-21 |
| 10001631 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner +6 more | 2018-06-19 |
| 9354524 | Projection exposure apparatus with optimized adjustment possibility | Boris Bittner, Holger Walter | 2016-05-31 |
| 9052609 | Projection exposure apparatus with optimized adjustment possibility | Boris Bittner, Holger Walter | 2015-06-09 |
| 8203696 | Projection exposure apparatus with optimized adjustment possibility | Boris Bittner, Holger Walter | 2012-06-19 |