Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9639007 | Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus | Timo Laufer | 2017-05-02 |
| 9134504 | Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus | Timo Laufer | 2015-09-15 |
| 8891172 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff +5 more | 2014-11-18 |
| 8508854 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff +5 more | 2013-08-13 |
| 8325322 | Optical correction device | Markus Hauf, Ulrich Schoenhoff, Payam Tayebati, Michael Thier, Tilmann Heil +7 more | 2012-12-04 |