Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470823 | Apparatus and method for forming a deposited film by a means of plasma CVD | Masahiro Kanai, Yuzo Koda, Takeshi Shishido | 2002-10-29 |
| 6399411 | Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Tadashi Hori, Shotaro Okabe, Akira Sakai, Yuzo Kohda | 2002-06-04 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Shotaro Okabe, Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +2 more | 2002-04-09 |
| 6287943 | Deposition of semiconductor layer by plasma process | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +1 more | 2001-09-11 |
| 6271055 | Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layers | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Hirokazu Ohtoshi, Akira Sakai +2 more | 2001-08-07 |
| 6162988 | Photovoltaic element | Shotaro Okabe, Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +2 more | 2000-12-19 |
| 6159300 | Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Tadashi Hori, Shotaro Okabe, Akira Sakai, Yuzo Kohda | 2000-12-12 |
| 6159763 | Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element | Akira Sakai, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Yuzo Kohda +1 more | 2000-12-12 |
| 6153013 | Deposited-film-forming apparatus | Akira Sakai, Shotaro Okabe, Masahiro Kanai, Yuzo Kohda, Tadashi Hori +1 more | 2000-11-28 |
| 6025039 | Method for producing a photovoltaic cell | — | 2000-02-15 |
| 5927994 | Method for manufacturing thin film | Yuzo Kohda, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Hori +1 more | 1999-07-27 |
| 5897332 | Method for manufacturing photoelectric conversion element | Tadashi Hori, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Yuzo Kohda +1 more | 1999-04-27 |
| 5769963 | Photovoltaic device | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Yuzo Koda +2 more | 1998-06-23 |
| 5720826 | Photovoltaic element and fabrication process thereof | Ryo Hayashi, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Jinsho Matsuyama +3 more | 1998-02-24 |