Issued Patents All Time
Showing 26–50 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6870310 | Multibeam generating apparatus and electron beam drawing apparatus | Hiroya Ohta, Norio Saito, Masaki Takakuwa, Sayaka Tanimoto, Takeshi Haraguchi | 2005-03-22 |
| 6787784 | Charged-particle beam drawing data creation method, and charged-particle beam drawing apparatus using the same | — | 2004-09-07 |
| 6670620 | Electron gun, illumination apparatus using the electron gun, and electron beam exposure apparatus using the illumination apparatus | — | 2003-12-30 |
| 6617595 | Multi-lens type electrostatic lens, electron beam exposure apparatus and charged beam applied apparatus using the lens, and device manufacturing method using these apparatuses | — | 2003-09-09 |
| 6515640 | Electron emission device with gap between electron emission electrode and substrate | Takeo Tsukamoto, Mamoru Miyawaki, Tetsuya Kaneko, Akira Suzuki, Isamu Shimoda +1 more | 2003-02-04 |
| 6465797 | Electron beam illumination apparatus, electron beam exposure apparatus, and device manufacturing method | — | 2002-10-15 |
| 6225637 | Electron beam exposure apparatus | Shigeru Terashima, Masato Muraki, Akira Miyake, Shin Matsui | 2001-05-01 |
| 6054713 | Electron beam exposure apparatus | Akira Miyake, Masato Muraki, Shigeru Terashima, Shin Matsui | 2000-04-25 |
| 6037601 | Electron beam illumination device, and exposure apparatus with electron beam illumination device | — | 2000-03-14 |
| 5838019 | Electron emitting element | Takeo Tsukamoto, Akira Shimizu, Akira Suzuki, Masao Sugata, Isamu Shimoda | 1998-11-17 |
| 5814832 | Electron emitting semiconductor device | Toshihiko Takeda, Takeo Tsukamoto, Nobuo Watanabe | 1998-09-29 |
| 5786658 | Electron emission device with gap between electron emission electrode and substrate | Takeo Tsukamoto, Mamoru Miyawaki, Tetsuya Kaneko, Akira Suzuki, Isamu Shimoda +1 more | 1998-07-28 |
| 5760417 | Semiconductor electron emission device | Nobuo Watanabe, Norio Kaneko, Takeo Tsukamoto | 1998-06-02 |
| 5627111 | Electron emitting device and process for producing the same | Takeo Tsukamoto, Akira Shimizu, Akira Suzuki, Masao Sugata, Isamu Shimoda | 1997-05-06 |
| 5576699 | Method and apparatus for transferring information by utilizing electron beam | Fumitaka Kan, Kenji Nakamura, Masanori Takenouchi, Naoji Hayakawa, Isamu Shimoda | 1996-11-19 |
| 5574438 | Method for transferring information, and in particular for performing a logic operation, using electron beams | Fumitaka Kan, Kenji Nakamura, Masanori Takenouchi, Naoji Hayakawa, Isamu Shimoda | 1996-11-12 |
| 5559342 | Electron emitting device having a polycrystalline silicon resistor coated with a silicide and an oxide of a work function reducing material | Takeo Tsukamoto, Akira Shimizu, Akira Suzuki, Masao Sugata, Isamu Shimoda | 1996-09-24 |
| 5554859 | Electron emission element with schottky junction | Takeo Tsukamoto, Nobuo Watanabe, Toshihiko Takeda | 1996-09-10 |
| 5414272 | Semiconductor electron emission element | Nobuo Watanabe, Takeo Tsukamoto | 1995-05-09 |
| 5391956 | Electron emitting device, method for producing the same and display apparatus and electron beam drawing apparatus utilizing the same | Nobuo Watanabe, Takeo Tsukamoto | 1995-02-21 |
| 5361015 | Electron emission element | Akira Suzuki, Isamu Shimoda, Tetsuya Kaneko, Takeo Tsukamoto, Toshihiko Takeda +2 more | 1994-11-01 |
| 5355127 | Method and apparatus for transferring information by utilizing electron beam | Fumitaka Kan, Kenji Nakamura, Masanori Takenouchi, Naoji Hayakawa, Isamu Shimoda | 1994-10-11 |
| 5327050 | Electron emitting device and process for producing the same | Takeo Tsukamoto, Akira Shimizu, Akira Suzuki, Masao Sugata, Isamu Shimoda | 1994-07-05 |
| 5304815 | Electron emission elements | Akira Suzuki, Takeo Tsukamoto, Akira Shimizu, Masao Sugata, Isamu Shimoda | 1994-04-19 |
| 5285079 | Electron emitting device, electron emitting apparatus and electron beam drawing apparatus | Takeo Tsukamoto, Nobuo Watanabe | 1994-02-08 |