Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7349064 | Immersion exposure technique | — | 2008-03-25 |
| 7186285 | Chemical filter arrangement for a semiconductor manufacturing apparatus | Kiyoshi Arakawa | 2007-03-06 |
| 7145629 | Exposure technique | — | 2006-12-05 |
| 6924877 | Chemical filter arrangement for a semiconductor manufacturing apparatus | Kiyoshi Arakawa | 2005-08-02 |
| 6788392 | Exposure apparatus, device manufacturing method, gas substituting apparatus, and gas substituting method | — | 2004-09-07 |
| 6734950 | Load-lock chamber and exposure apparatus using the same | — | 2004-05-11 |
| 6665046 | Exposure apparatus and device manufacturing method | Hideki Nogawa | 2003-12-16 |
| 5880653 | Electromagnetic relay and its manufacture | Kazuo Yamada, Ryutaro Tsuchiya, Senjiro Ishibashi, Mitsuhiro Kawai, Kiyoaki Kuzukawa +4 more | 1999-03-09 |
| 5121160 | Exposure method and apparatus | Naoto Sano, Masato Aketagawa, Takahisa Shiozawa | 1992-06-09 |
| 4952060 | Alignment method and a projection exposure apparatus using the same | Hideki Ina, Fumio Sakai | 1990-08-28 |
| 4709931 | Seal for dampers on motor vehicles | Keiichi Shimizu, Sanae Kikuchi | 1987-12-01 |