Issued Patents All Time
Showing 51–75 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852935 | Substrate processing apparatus | Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura | 2017-12-26 |
| 9761478 | Substrate transport apparatus | Ulysses Gilchrist | 2017-09-12 |
| 9751209 | Compact direct drive spindle | — | 2017-09-05 |
| 9656386 | Coaxial drive vacuum robot | Ulysses Gilchrist | 2017-05-23 |
| 9623555 | Dual arm robot | Alexander Krupyshev, Martin R. Elliott, Christopher Hofmeister | 2017-04-18 |
| 9570330 | Substrate processing apparatus | Christopher Hofmeister | 2017-02-14 |
| 9248568 | Unequal link SCARA arm | David Martin, Ulysses Gilchrist | 2016-02-02 |
| 9230841 | Substrate processing apparatus | Ulysses Gilchrist, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura | 2016-01-05 |
| 9186799 | Compact direct drive spindle | — | 2015-11-17 |
| 9020617 | Scalable motion control system | Martin Hosek, Stuart Beale, Roumen Botev, Matthew W. Coady, Christopher Hofmeister +2 more | 2015-04-28 |
| 8918203 | Substrate processing apparatus | Ulysses Gilchrist, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura | 2014-12-23 |
| 8827617 | Substrate processing apparatus | Christopher Hofmeister | 2014-09-09 |
| 8747050 | Substrate transport apparatus | Christopher Hofmeister | 2014-06-10 |
| 8651789 | Substrate processing apparatus | Christopher Hofmeister | 2014-02-18 |
| 8602706 | Substrate processing apparatus | Christopher Hofmeister | 2013-12-10 |
| 8371792 | Substrate processing apparatus | Christopher Hofmeister | 2013-02-12 |
| 8267636 | Substrate transport apparatus | Christopher Hofmeister | 2012-09-18 |
| 7988398 | Linear substrate transport apparatus | Christopher Hofmeister | 2011-08-02 |
| 7959395 | Substrate processing apparatus | Christopher Hofmeister | 2011-06-14 |
| 7925378 | Process apparatus with on-the-fly workpiece centering | Ulysses Gilchrist, Haniel Olivera, William J. Fosnight, Richard J. Pickreign | 2011-04-12 |
| 7904182 | Scalable motion control system | Martin Hosek, Stuart Beale, Roumen Botev, Matthew W. Coady, Christopher Hofmeister +2 more | 2011-03-08 |
| 7607879 | Substrate processing apparatus with removable component module | Daniel A. Hall, Christopher Hofmeister, William J. Fosnight, Ulysses Gilchrist, Jeff G. Araujo | 2009-10-27 |
| 7578649 | Dual arm substrate transport apparatus | Todd R. Solomon | 2009-08-25 |
| 7575406 | Substrate processing apparatus | Christopher Hofmeister | 2009-08-18 |
| 6769861 | Apparatus for alignment and orientation of a wafer for processing | — | 2004-08-03 |