Issued Patents All Time
Showing 26–50 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251059 | Method and apparatus for substrate transport apparatus position compensation | Jairo T. Moura, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2022-02-15 |
| 11192239 | Substrate processing apparatus | Vincent W. Tsang | 2021-12-07 |
| 11195738 | Substrate processing apparatus | Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura | 2021-12-07 |
| 11121015 | Substrate transport | Daniel Babbs, Robert C. May, Krzysztof A Majczak | 2021-09-14 |
| 11110598 | Compact direct drive spindle | — | 2021-09-07 |
| 10818537 | Substrate transport apparatus | Ulysses Gilchrist | 2020-10-27 |
| 10777438 | Processing apparatus | Ulysses Gilchrist | 2020-09-15 |
| 10748799 | Substrate transport apparatus with interchangeable motor modules | — | 2020-08-18 |
| 10737381 | Dual arm robot | Alexander Krupyshev, Martin R. Elliot, Christopher Hofmeister | 2020-08-11 |
| 10661990 | Automated cryogenic storage system | Frank Hunt, Lingchen Sun, Julian Warhurst, Bruce S. Zandi, Anthony C. Bonora | 2020-05-26 |
| 10651067 | Method and apparatus for substrate transport apparatus position compensation | Jairo T. Moura, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2020-05-12 |
| 10600665 | Substrate processing apparatus | Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura | 2020-03-24 |
| 10493620 | Compact direct drive spindle | — | 2019-12-03 |
| 10488851 | Scalable motion control system | Martin Hosek, Stuart Beale, Roumen Botev, Matthew W. Coady, Christopher Hofmeister +2 more | 2019-11-26 |
| 10468936 | Sealed robot drive | Jairo T. Moura, Ulysses Gilchrist | 2019-11-05 |
| 10421607 | Cryogenic freezer | Frank Hunt, Lingchen Sun, Julian Warhurst, Bruce S. Zandi, Jeffrey S. Brooks | 2019-09-24 |
| 10406679 | Unequal link SCARA arm | David Martin, Ulysses Gilchrist | 2019-09-10 |
| 10395959 | Substrate transport | Daniel Babbs, Robert C. May, Krysztof A. Majczak | 2019-08-27 |
| 10336539 | Automated cryogenic storage system | Frank Hunt, Lingchen Sun, Julian Warhurst, Bruce S. Zandi, Anthony C. Bonora | 2019-07-02 |
| 10325795 | Substrate processing apparatus | Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura | 2019-06-18 |
| 10239707 | Semiconductor wafer handling and transport | — | 2019-03-26 |
| 10204817 | Substrate transport apparatus | Ulysses Gilchrist | 2019-02-12 |
| 10134621 | Substrate transport apparatus | Ulysses Gilchrist, Alexander Krupyshev | 2018-11-20 |
| 9948155 | Sealed robot drive | Jairo T. Moura, Ulysses Gilchrist | 2018-04-17 |
| 9862554 | Semiconductor wafer handling and transport | — | 2018-01-09 |