Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7560705 | Workpiece handling scan arm for ion implantation system | Ari Eiriksson, Donovan Beckel, Robert J. Mitchell, Michel Pharand, Marvin R. LaFontaine +4 more | 2009-07-14 |