Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11587758 | Apparatus of plural charged-particle beams | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2023-02-21 |
| 11538655 | Multi-beam inspection apparatus | Xuedong Liu, Zhong-Wei Chen, Weiming Ren | 2022-12-27 |
| 11469074 | Multiple charged-particle beam apparatus with low crosstalk | Weiming Ren, Qingpo Xi, Xuedong Liu | 2022-10-11 |
| 11398368 | Apparatus of plural charged-particle beams | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2022-07-26 |
| 11328894 | Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus | Weiming Ren, Xuedong Liu, Xinan Luo, Zhongwei Chen | 2022-05-10 |
| 11302514 | Apparatus for multiple charged-particle beams | Weiming Ren, Xuedong Liu, Zong-wei Chen | 2022-04-12 |
| 11289304 | Apparatus using multiple beams of charged particles | Weiming Ren, Xuedong Liu, Zhong-Wei Chen | 2022-03-29 |
| 11282675 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuedong Liu, Zhong-Wei Chen | 2022-03-22 |
| 11232928 | Multi-beam inspection apparatus | Weiming Ren, Qian Zhang, Xuedong Liu | 2022-01-25 |
| 11222766 | Multi-cell detector for charged particles | Joe Wang, Yongxin Wang, Zhong-Wei Chen | 2022-01-11 |
| 11062877 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Juying Dou, Zhongwei Chen | 2021-07-13 |
| 11062874 | Apparatus using multiple charged particle beams | Weiming Ren, Xuedong Liu, Zhong-Wei Chen | 2021-07-13 |
| 10892138 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuedong Liu, Zhong-Wei Chen | 2021-01-12 |
| 10879031 | Apparatus of plural charged-particle beams | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2020-12-29 |
| 10879032 | Multi-beam inspection apparatus | Xuedong Liu, Zhong-Wei Chen, Weiming Ren | 2020-12-29 |
| 10811222 | Apparatus of plural charged-particle beams | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2020-10-20 |
| 10541110 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Juying Dou, Zhongwei Chen | 2020-01-21 |
| 10395886 | Apparatus of plural charged-particle beams | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2019-08-27 |
| 10141160 | Apparatus of plural charged-particle beams | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2018-11-27 |
| 10062541 | Apparatus of plural charged-particle beams | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2018-08-28 |
| 9922799 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Juying Dou, Zhongwei Chen | 2018-03-20 |
| 9431209 | Apparatus of plural charged particle beams with multi-axis magnetic lenses | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2016-08-30 |
| 9202658 | Multi-axis magnetic lens for focusing a plurality of charged particle beams | Zhongwei Chen, Weiming Ren, Xuedong Liu | 2015-12-01 |
| 9105440 | Apparatus of plural charged particle beams with multi-axis magnetic lens | Zhongwei Chen, Weiming Ren, Xuedong Liu | 2015-08-11 |