Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401734 | Lithographic method and apparatus | Robbert Jan Voogd | 2019-09-03 |
| 9170498 | Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor | Marcus Adrianus Van De Kerkhof, Wilhelmus Petrus De Boeij, Hendrikus Robertus Marie Van Greevenbroek, Michel François Hubert Klaassen, Martijn Gerard Dominique Wehrens +2 more | 2015-10-27 |
| 8760625 | Lithographic apparatus, aberration detector and device manufacturing method | — | 2014-06-24 |
| 8269186 | Radiation detector | Martijn Gerard Dominique Wehrens | 2012-09-18 |
| 8124939 | Radiation detector | Martijn Gerard Dominique Wehrens | 2012-02-28 |