Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8675210 | Level sensor, lithographic apparatus, and substrate surface positioning method | Arie Jeffrey Den Boef, Jozef Petrus Henricus Benschop, Ralph Brinkhof, Willem Jurrianus Venema, Lukasz Jerzy Macht +1 more | 2014-03-18 |