Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775692 | Method for manufacturing multilayer film-deposited substrate and multilayer film-deposited substrate | Yunosuke Ishikawa, Makoto Kurumisawa | 2020-09-15 |
| 9720316 | Reflective mask blank for EUV lithography and process for its production, as well as substrate with reflective layer for such mask blank and process for its production | — | 2017-08-01 |
| 9448469 | Reflective mask blank for EUV lithography, or reflective layer-coated substrate for EUV lithography, and process for its production | — | 2016-09-20 |
| 9423684 | Reflective mask blank for EUV lithography and process for its production | Kazunobu Maeshige | 2016-08-23 |
| 9207529 | Reflective mask blank for EUV lithography, and process for its production | Takeru Kinoshita, Kazuyuki Hayashi | 2015-12-08 |
| 9052601 | Reflective mask blank for EUV lithography and process for its production, as well as substrate with reflective layer for such mask blank and process for its production | — | 2015-06-09 |
| 8993201 | Reflective layer-equipped substrate for EUV lithography, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and process for production of the reflective layer-equipped substrate | Mitsuhiko Komakine, Yoshiaki Ikuta | 2015-03-31 |
| 8986910 | Optical member for EUV lithography | — | 2015-03-24 |
| 8927179 | Optical member for EUV lithography, and process for production of reflective layer-equipped substrate | — | 2015-01-06 |
| 8828626 | Substrate with reflective layer for EUV lithography and reflective mask blank for EUV lithography | Takeru Kinoshita | 2014-09-09 |
| 8580465 | Multilayer mirror for EUV lithography and process for its production | Mitsuhiko Komakine, Yoshiaki Ikuta | 2013-11-12 |
| 8088538 | Reflective mask blank for EUV lithography | Kazyuki Hayashi, Kazuo Kadowaki, Takashi Sugiyama | 2012-01-03 |
| 7906259 | Reflective mask blank for EUV lithography | Kazuyuki Hayashi, Kazuo Kadowaki, Takashi Sugiyama | 2011-03-15 |
| 7833682 | Reflective mask blank for EUV lithography and substrate with functional film for the same | Kazuyuki Hayashi, Kazuo Kadowaki, Takashi Sugiyama | 2010-11-16 |
| 7736821 | Reflective mask blank for EUV lithography and substrate with a conductive film for the mask blank | Kazuyuki Hayashi, Takashi Sugiyama | 2010-06-15 |
| 6678866 | Notification information display apparatus notification information display system and recording medium | Hideo Sugimoto, Yukio Ishikawa, Toshiya Fukuda, Tetsuya Uchida, Tomoko Koda +8 more | 2004-01-13 |