Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8088538 | Reflective mask blank for EUV lithography | Kazuo Kadowaki, Masaki Mikami, Takashi Sugiyama | 2012-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8088538 | Reflective mask blank for EUV lithography | Kazuo Kadowaki, Masaki Mikami, Takashi Sugiyama | 2012-01-03 |