Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8422523 | Laser light-source apparatus and projector apparatus | Tatsuro Hirose, Taisuke Murata | 2013-04-16 |
| 8088538 | Reflective mask blank for EUV lithography | Kazyuki Hayashi, Masaki Mikami, Takashi Sugiyama | 2012-01-03 |
| 8089692 | Projection type image display apparatus | Norihiro Watanabe, Atsushi Michimori, Takumi Kijima | 2012-01-03 |
| 8003282 | Reflective mask blank for EUV lithography, and substrate with functional film for the mask blank | Kazuyuki Hayashi, Takashi Sugiyama | 2011-08-23 |
| 7906259 | Reflective mask blank for EUV lithography | Kazuyuki Hayashi, Takashi Sugiyama, Masaki Mikami | 2011-03-15 |
| 7833682 | Reflective mask blank for EUV lithography and substrate with functional film for the same | Kazuyuki Hayashi, Takashi Sugiyama, Masaki Mikami | 2010-11-16 |
| 7718324 | Reflective mask blank for EUV lithography | Kazuyuki Hayashi, Takashi Sugiyama | 2010-05-18 |
| 7713666 | Reflective mask blank for EUV lithography | Kazuyuki Hayashi, Takashi Sugiyama | 2010-05-11 |
| 7189460 | High reflectance mirror | Naoko Shin, Takuji Oyama | 2007-03-13 |
| 5917630 | Controlling apparatus for remote control operation | Jun Nosaka, Tadamitsu Isonaka, Kouichi Katsumi, Chiaki Nobuoka, Takanori Iida +2 more | 1999-06-29 |