Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8993201 | Reflective layer-equipped substrate for EUV lithography, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and process for production of the reflective layer-equipped substrate | Masaki Mikami, Yoshiaki Ikuta | 2015-03-31 |
| 8580465 | Multilayer mirror for EUV lithography and process for its production | Masaki Mikami, Yoshiaki Ikuta | 2013-11-12 |
| 8021212 | Apparatus for polishing edge surface of glass substrate for magnetic recording media, and process for producing glass substrate | Shohei Chida, Masami Kaneko | 2011-09-20 |