Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962732 | Process for controlling thin film uniformity and products produced thereby | Takako Takehara, William Harshbarger | 2005-11-08 |
| 6858548 | Application of carbon doped silicon oxide film to flat panel industry | Quanyuan Shang, William Harshbarger | 2005-02-22 |
| 6827987 | Method of reducing an electrostatic charge on a substrate during a PECVD process | Soo Young Choi, Takako Takehara, William Harshbarger | 2004-12-07 |
| 6355108 | Film deposition using a finger type shadow frame | Quanyuan Shang, Robert Robertson, Soo Young Choi, Kam S. Law, Robert I. Greene +1 more | 2002-03-12 |