Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6090706 | Preconditioning process for treating deposition chamber prior to deposition of tungsten silicide coating on active substrates therein | Michio Aruga, Mei Chang | 2000-07-18 |
| 5565382 | Process for forming tungsten silicide on semiconductor wafer using dichlorosilane gas | Meng Chu Tseng, Mei Chang | 1996-10-15 |
| 5510297 | Process for uniform deposition of tungsten silicide on semiconductor wafers by treatment of susceptor having aluminum nitride surface thereon with tungsten silicide after cleaning of susceptor | Michio Aruga, Mei Chang | 1996-04-23 |
| 5482749 | Pretreatment process for treating aluminum-bearing surfaces of deposition chamber prior to deposition of tungsten silicide coating on substrate therein | Michio Aruga, Mei Chang | 1996-01-09 |
| 5326725 | Clamping ring and susceptor therefor | Semyon Sherstinsky, Charles C. Harris, Mei Chang, Dale R. Du Bois, James Roberts +3 more | 1994-07-05 |