Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5514247 | Process for plasma etching of vias | Hongching Shan | 1996-05-07 |
| 5176790 | Process for forming a via in an integrated circuit structure by etching through an insulation layer while inhibiting sputtering of underlying metal | Paul Arleo, Jon Henri, Graham W. Hills, Jerry Wong | 1993-01-05 |
| 5110712 | Incorporation of dielectric layers in a semiconductor | Daniel D. Kessler, Christopher Beatty, Mark D. Crook | 1992-05-05 |