Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8802572 | Method of patterning a low-k dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Dmitry Lubomirsky, Sergey G. Belostotskiy | 2014-08-12 |
| 8748322 | Silicon oxide recess etch | Nancy Fung, David T. Or, Lina Zhu, Jeremiah T. Pender, Srinivas D. Nemani +3 more | 2014-06-10 |
| 7790047 | Method for removing masking materials with reduced low-k dielectric material damage | Zhilin Huang, Siyi Li | 2010-09-07 |