Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12476120 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Randy Harris, Coby Scott GROVE, Paul Z. Wirth, Avinash SHANTARAM, Alpay Yilmaz +3 more | 2025-11-18 | |
| 11935771 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Randy Harris, Coby Scott GROVE, Paul Z. Wirth, Avinash SHANTARAM, Alpay Yilmaz +3 more | 2024-03-19 | $54,086,000 |