Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432259 | Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates | Hamid Noorbakhsh, Michael Welch, Siamak Salimian, Paul Luscher, Hongching Shan +2 more | 2002-08-13 |
| 6132165 | Single drive, dual plane robot | — | 2000-10-17 |