Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7094315 | Chamber configuration for confining a plasma | Mukund Srinivasan, Eric H. Lenz | 2006-08-22 |
| 6872281 | Chamber configuration for confining a plasma | Mukund Srinivasan, Eric H. Lenz | 2005-03-29 |
| 6583572 | Inductive plasma processor including current sensor for plasma excitation coil | Robert Veltrop, Thomas E. Wicker | 2003-06-24 |
| 6527912 | Stacked RF excitation coil for inductive plasma processor | Robert Veltrop, Thomas E. Wicker | 2003-03-04 |
| 6463875 | Multiple coil antenna for inductively-coupled plasma generation systems | Robert Veltrop, Thomas E. Wicker | 2002-10-15 |
| 6164241 | Multiple coil antenna for inductively-coupled plasma generation systems | Robert Veltrop, Thomas E. Wicker | 2000-12-26 |
| 6155199 | Parallel-antenna transformer-coupled plasma generation system | Robert Veltrop, Thomas E. Wicker | 2000-12-05 |
| 6063234 | Temperature sensing system for use in a radio frequency environment | William S. Kennedy | 2000-05-16 |
| 6028286 | Method for igniting a plasma inside a plasma processing reactor | Thomas E. Wicker, Joel M. Cook | 2000-02-22 |