Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4842683 | Magnetic field-enhanced plasma etch reactor | David Cheng, Dan Maydan, Sasson Somekh, Kenneth R. Stalder, Dana L. Andrews +4 more | 1989-06-27 |
| 4613400 | In-situ photoresist capping process for plasma etching | Simon W. Tam, Ronald P. Reade, David N. Wang | 1986-09-23 |