Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7147719 | Double slit-valve doors for plasma processing | Michael Welch, Paul Luscher, Evans Lee, James D. Carducci, Siamak Salimian | 2006-12-12 |
| 6647918 | Double slit-valve doors for plasma processing | Michael Welch, Paul Luscher, Evans Lee, James D. Carducci, Siamak Salimian | 2003-11-18 |
| 6192827 | Double slit-valve doors for plasma processing | Michael Welch, Paul Luscher, Evans Lee, James D. Carducci, Siamak Salimian | 2001-02-27 |