Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7253424 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie +4 more | 2007-08-07 |
| 7235797 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase +2 more | 2007-06-26 |
| 7049210 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie +4 more | 2006-05-23 |
| 6998626 | Method of producing a dopant gas species | Shu Satoh | 2006-02-14 |
| 6989315 | SIMOX using controlled water vapor for oxygen implants | Robert P. Dolan, Bernhard F. Cordts, III, Marvin Farley | 2006-01-24 |
| 6956223 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor | Theodore H. Smick, Frank D. Roberts, II, Marvin Farley, Takao Sakase, Adrian Murrell +2 more | 2005-10-18 |
| 6908836 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase +2 more | 2005-06-21 |
| 6878946 | Indirectly heated button cathode for an ion source | Marvin Farley, Takao Sakase, Shu Satoh, Peter Rose, Christos Christou | 2005-04-12 |
| 6864494 | Semiconductor processing apparatus having a moving member and a force compensator therefor | — | 2005-03-08 |
| 6689221 | Cooling gas delivery system for a rotatable semiconductor substrate support assembly | Theodore H. Smick | 2004-02-10 |
| 6555832 | Determining beam alignment in ion implantation using Rutherford Back Scattering | Theodore H. Smick, John Ruffell, Marvin Farley, Peter Rose | 2003-04-29 |
| 6515288 | Vacuum bearing structure and a method of supporting a movable member | Theodore H. Smick, Marvin Farley, Takao Sakase | 2003-02-04 |
| 6501078 | Ion extraction assembly | Theodore H. Smick, Marvin Farley, Takao Sakase | 2002-12-31 |
| 6437351 | Method and apparatus for controlling a workpiece in a vacuum chamber | Theodore H. Smick, Marvin Farley | 2002-08-20 |
| 6423975 | Wafer holder for simox processing | Theodore H. Smick, Bernhard F. Cordts, III, Robert S. Andrews | 2002-07-23 |
| 6350991 | Ion implanter with vacuum piston counterbalance | — | 2002-02-26 |
| 6331713 | Movable ion source assembly | Theodore H. Smick, Marvin Farley, Shu Satoh, Peter Rose | 2001-12-18 |
| 6323496 | Apparatus for reducing distortion in fluid bearing surfaces | Takao Sakase, Theodore H. Smick | 2001-11-27 |
| 6274875 | Fluid bearing vacuum seal assembly | Theodore H. Smick, Marvin Farley, Takao Sakase | 2001-08-14 |
| 6271530 | Apparatus for reducing distortion in fluid bearing surfaces | Theodore H. Smick, Marvin Farley, Takao Sakase | 2001-08-07 |
| 6268609 | Apparatus and method for reducing heating of a workpiece in ion implantation | Theodore H. Smick, Marvin Farley | 2001-07-31 |
| 6248642 | SIMOX using controlled water vapor for oxygen implants | Robert P. Dolan, Bernhard F. Cordts, III, Marvin Farley | 2001-06-19 |
| 6163033 | Method and apparatus for controlling a workpiece in a vacuum chamber | Theodore H. Smick, Marvin Farley | 2000-12-19 |
| 5898179 | Method and apparatus for controlling a workpiece in a vacuum chamber | Theodore H. Smick, Marvin Farley | 1999-04-27 |
| 4672210 | Ion implanter target chamber | Allen E. Armstrong, Victor M. Benveniste | 1987-06-09 |