Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7333871 | Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools | — | 2008-02-19 |
| 7272459 | Method, system and medium for controlling manufacture process having multivariate input parameters | Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel +2 more | 2007-09-18 |
| 7201936 | Method of feedback control of sub-atmospheric chemical vapor deposition processes | Arulkumar Shanmugasundram, Rong Pan, Manuel A. Hernandez, Amna Mohammad | 2007-04-10 |
| 7160739 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles | Arulkumar Shanmugasundram, Gopalakrishna B. Prabhu | 2007-01-09 |
| 7082345 | Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities | Arulkumar Shanmugasundram, Helen R. Armer | 2006-07-25 |
| 7047099 | Integrating tool, module, and fab level control | Arulkumar Shanmugasundram | 2006-05-16 |
| 6999836 | Method, system, and medium for handling misrepresentative metrology data within an advanced process control system | Arulkumar Shanmugasundram, Jacques Seror, Yuri Kokotov, Efim Entin | 2006-02-14 |
| 6913938 | Feedback control of plasma-enhanced chemical vapor deposition processes | Arulkumar Shanmugasundram, Ilias Iliopoulos, Alexander Parkhomovsky, Martin Jay Seamons | 2005-07-05 |