Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5985490 | Hologram and method of and apparatus for producing the same | Kazuhiro Suga, Kenji Ueda, Hiroyuki Nishimura | 1999-11-16 |
| 5958632 | Method of making mask pattern utilizing sizing dependent on mask material and mask formed through the method | — | 1999-09-28 |
| 5891349 | Plasma enhanced CVD apparatus and process, and dry etching apparatus and process | Ryoki Tobe, Masao Sasaki, Ken-ichi Takagi | 1999-04-06 |
| 5855685 | Plasma enhanced CVD apparatus, plasma enhanced processing apparatus and plasma enhanced CVD method | Ryoki Tobe, Masao Sasaki | 1999-01-05 |
| 5744377 | Method for forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means | Tsukasa Kobayashi, Shinji Takagi | 1998-04-28 |
| 5721021 | Method of depositing titanium-containing conductive thin film | Ryoki Tobe, Masao Sasaki, Ken-ichi Takagi | 1998-02-24 |
| 5672385 | Titanium nitride film-MOCVD method incorporating use of tetrakisdialkylaminotitanium as a source gas | Hitoshi Jimba, So Won Kim | 1997-09-30 |
| 5660954 | Hologram and method of and apparatus for producing the same | Kazuhiro Suga, Kenji Ueda, Hiroyuki Nishimura | 1997-08-26 |
| 5594280 | Method of forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means | Tsukasa Kobayashi, Shinji Takagi | 1997-01-14 |
| 5453338 | Hologram and method of and apparatus for producing the same | Kazuhiro Suga, Kenji Ueda, Hiroyuki Nishimura | 1995-09-26 |
| 5376628 | Method of improving or producing oxide superconductor | Hideo Mito | 1994-12-27 |
| 5366766 | Method of manufacturing thin film and thin film device | Nobuo Shimo | 1994-11-22 |
| 4981103 | Apparatus for forming a metal thin film utilizing temperature controlling means | Tsukasa Kobayashi, Shinji Takagi | 1991-01-01 |
| 4963423 | Method for forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means | Tsukasa Kobayashi, Shinji Takagi | 1990-10-16 |
| 4919783 | Apparatus for processing an object by gas plasma with a reduced damage | Tatsuo Asamaki, Hideo Mito, Yukito Nakagawa | 1990-04-24 |
| 4664747 | Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same | Hideo Mito | 1987-05-12 |