Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383880 | NH3/N2-plasma treatment for reduced nickel silicide bridging | Minh Van Ngo, Christy Mei-Chu Woo | 2002-05-07 |
| 6348410 | Low temperature hillock suppression method in integrated circuit interconnects | Minh Van Ngo, Dawn Hopper | 2002-02-19 |
| 6235654 | Process for forming PECVD nitride with a very low deposition rate | Minh Van Ngo, Hartmut Ruelke | 2001-05-22 |
| 6221793 | Process for forming PECVD undoped oxide with a super low deposition rate on a single state deposition | Minh Van Ngo, Hartmut Ruelke | 2001-04-24 |
| 6143672 | Method of reducing metal voidings in 0.25 .mu.m AL interconnect | Minh Van Ngo, Simon S. Chan, Suzette K. Pangrle | 2000-11-07 |
| 6033922 | Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer | Daniel V. Rowland, Norein (Narendra) Patel | 2000-03-07 |
| 5970313 | Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer | Daniel V. Rowland, Norein Narendra Patel | 1999-10-19 |