Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635501 | Low temperature cobalt silicidation process monitor | — | 2003-10-21 |
| 6033922 | Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer | Robert A. Huertas, Norein (Narendra) Patel | 2000-03-07 |
| 5970313 | Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer | Robert A. Huertas, Norein Narendra Patel | 1999-10-19 |