Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6814837 | Controlled gas supply line apparatus and process for infilm and onfilm defect reduction | Kin-Sang Lam, Roger Sorum | 2004-11-09 |
| 6589350 | Vacuum processing chamber with controlled gas supply valve | — | 2003-07-08 |
| 6270580 | Modified material deposition sequence for reduced detect densities in semiconductor manufacturing | Lan Vu, Jeff Watts | 2001-08-07 |
| 5782980 | Low pressure chemical vapor deposition apparatus including a process gas heating subsystem | Michael Allen, Patrick Lee | 1998-07-21 |
| 5528226 | Apparatus and method for controlling the burn-off operation of a gas in a semiconductor wafer fabrication furnace | William R. Brown, Donald L. Friede | 1996-06-18 |