Patents per Year
Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6202589 | Grounding mechanism which maintains a low resistance electrical ground path between a plate electrode and an etch chamber | Stephanie Annette Grahn, Toby J. Winters | 2001-03-20 | $7,513,000 |
| 6149368 | Wafer disk pad having one or more wafer loading points to facilitate vacuum wand wafer loading and unloading | J. Carlos Reyes, Jr., David S. McStay | 2000-11-21 | $5,742,000 |
| 5672882 | Ion implantation device with a closed-loop process chamber pressure control system | Dennis J. Day | 1997-09-30 | $7,869,000 |
| 5583799 | M-Gage data acquisition system and method | Van Le | 1996-12-10 | $6,328,000 |
| 5528226 | Apparatus and method for controlling the burn-off operation of a gas in a semiconductor wafer fabrication furnace | William R. Brown, Dennis C. Swartz | 1996-06-18 | $10,145,000 |
| 5418378 | Ion implant device with modulated scan output | Van Le, Denver L. Dolman | 1995-05-23 | $8,321,000 |