Patents per Year
Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6599763 | Wafer randomization and alignment system integrated into a multiple chamber wafer processing system | Jose Carlos Reyes, Michael McCarthy | 2003-07-29 | $3,092,000 |
| 6461434 | Quick-change flange | Michael Patrick McFee | 2002-10-08 | $890,000 |
| 6328847 | Downstream plasma reactor system incorporating a plasma-resistant blocking member | — | 2001-12-11 | $6,262,000 |
| 6202589 | Grounding mechanism which maintains a low resistance electrical ground path between a plate electrode and an etch chamber | Stephanie Annette Grahn, Donald L. Friede | 2001-03-20 | $7,513,000 |
| 6165313 | Downstream plasma reactor system with an improved plasma tube sealing configuration | Moutasim KHOGLY, Terrance P. Melvin | 2000-12-26 | $2,711,000 |
| 5915438 | Mobile work station for clean room environments | Bill Brown, Stephanie Annette Grahn | 1999-06-29 | $2,567,000 |