Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum processing chamber with controlled gas supply valve

Vacuum processing chamber with controlled gas supply valve

US Patent 6589350 · Granted Jul 8, 2003

Estimated economic value: $2,679,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Controlled gas supply line apparatus and process for infilm and onfilm defect re2004
Modified material deposition sequence for reduced detect densities in semiconduc2001
Low pressure chemical vapor deposition apparatus including a process gas heating1998
Apparatus and method for controlling the burn-off operation of a gas in a semico1996