Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6814837 | Controlled gas supply line apparatus and process for infilm and onfilm defect reduction | Dennis C. Swartz, Roger Sorum | 2004-11-09 |
| 6417014 | Method and apparatus for reducing wafer to wafer deposition variation | Sey-Ping Sun | 2002-07-09 |
| 5282947 | Magnet assembly for enhanced sputter target erosion | Hunter B. Brugge | 1994-02-01 |
| 5271817 | Design for sputter targets to reduce defects in refractory metal films | Hunter B. Brugge | 1993-12-21 |