Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5782980 | Low pressure chemical vapor deposition apparatus including a process gas heating subsystem | Michael Allen, Dennis C. Swartz | 1998-07-21 |
| 5591299 | System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools | Jay J. Seaton, Michael Allen, Donald G. Landis, David Linzy, Susan B. Luca | 1997-01-07 |