Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6761812 | Apparatus and method for electrochemical metal deposition | Gerd Marxsen | 2004-07-13 |
| 6620726 | Method of forming metal lines having improved uniformity on a substrate | Markus Nopper, Gerd Marxsen | 2003-09-16 |
| 6362100 | Methods and apparatus for forming a copper interconnect | Takeshi Nogami, Valery M. Dubin | 2002-03-26 |
| 6106680 | Apparatus for forming a copper interconnect | Takeshi Nogami, Valery M. Dubin | 2000-08-22 |
| 6103086 | Method of forming reliable copper interconnects with improved hole filling | Christy Mei-Chu Woo, Sergey Lopatin | 2000-08-15 |