Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838573 | Copper CVD precursors with enhanced adhesion properties | Morteza Farnia, Robert Sam Zorich, James Richard Thurmond | 2005-01-04 |
| 6818783 | Volatile precursors for deposition of metals and metal-containing films | David A. Roberts, Morteza Farnia, Melanie Boze | 2004-11-16 |
| 6552209 | Preparation of metal imino/amino complexes for metal oxide and metal nitride thin films | Xinjian Lei | 2003-04-22 |
| 6537613 | Process for metal metalloid oxides and nitrides with compositional gradients | Yoshihide Senzaki, Arthur Kenneth Hochberg | 2003-03-25 |
| 6503561 | Liquid precursor mixtures for deposition of multicomponent metal containing materials | Yoshihide Senzaki, David A. Roberts, Arthur Kenneth Hochberg | 2003-01-07 |
| 6500499 | Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors | Yoshihide Senzaki, Arthur Kenneth Hochberg, David A. Roberts, Glenn B. Alers, Robert McLemore Fleming | 2002-12-31 |
| 6319567 | Synthesis of tantalum nitride | Yoshihide Senzaki, Arthur Kenneth Hochberg | 2001-11-20 |
| 6238734 | Liquid precursor mixtures for deposition of multicomponent metal containing materials | Yoshihide Senzaki, David A. Roberts | 2001-05-29 |
| 6096913 | Production of metal-ligand complexes | Yoshihide Senzaki, David A. Roberts | 2000-08-01 |
| 6046364 | Regeneration of metal CVD precursors | John C. Gordon, Yoshihide Senzaki | 2000-04-04 |
| RE35614 | Process for improved quality of CVD copper films | Arthur Kenneth Hochberg, David A. Roberts | 1997-09-23 |
| 5322712 | Process for improved quality of CVD copper films | Arthur Kenneth Hochberg, David A. Roberts | 1994-06-21 |
| 5319118 | Volatile barium precursor and use of precursor in OMCVD process | Beth A. Muratore, Paul N. Dyer | 1994-06-07 |
| 5273775 | Process for selectively depositing copper aluminum alloy onto a substrate | Paul N. Dyer, Stephen M. Fine | 1993-12-28 |
| 5252733 | Volatile crown ligand .beta.-diketonate alkaline earth metal complexes | Guido P. Pez | 1993-10-12 |
| 5221366 | Etching agents comprising .beta.-diketone and .beta.-ketoimine ligands and a process for using the same | David A. Roberts, John C. Ivankovits, David A. Bohling | 1993-06-22 |
| 5187300 | Volatile precursors for copper CVD | — | 1993-02-16 |
| 5144049 | Volatile liquid precursors for the chemical vapor deposition of copper | Beth A. Muratore | 1992-09-01 |
| 5098516 | Processes for the chemical vapor deposition of copper and etching of copper | Paul N. Dyer | 1992-03-24 |
| 5094701 | Cleaning agents comprising beta-diketone and beta-ketoimine ligands and a process for using the same | John C. Ivankovits, David A. Roberts, David A. Bohling | 1992-03-10 |
| 5085731 | Volatile liquid precursors for the chemical vapor deposition of copper | Beth A. Muratore | 1992-02-04 |
| 5062902 | Fluxing agents comprising .beta.-diketone and .beta.-ketoimine ligands and a process for using the same | Thomas L. Ellison, David A. Roberts, John C. Ivankovits | 1991-11-05 |
| 5028724 | Synthesis of volatile fluorinated and non-fluorinated metal-beta-ketonate and metal-beta-ketoiminato complexes | John C. Ivankovits, David A. Bohling, David A. Roberts | 1991-07-02 |
| 5009725 | Fluxing agents comprising .beta.-diketone and .beta.-ketoimine ligands and a process for using the same | Thomas L. Ellison, David A. Roberts, John C. Ivankovits | 1991-04-23 |
| 5008415 | Volatile fluorinated .beta.-ketoimines and associated metal complexes | — | 1991-04-16 |