Issued Patents All Time
Showing 101–109 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458984 | Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS) | Thomas H. Baum, Frank R. Hedges, David Bernhard, Brian L. Benac, Scott L. Battle +1 more | 2002-10-01 |
| 6440202 | Pyrazolate copper complexes, and MOCVD of copper using same | Thomas H. Baum, Ziyun Wang | 2002-08-27 |
| 6417369 | Pyrazolate copper complexes, and MOCVD of copper using same | Thomas H. Baum, Ziyun Wang | 2002-07-09 |
| 6340769 | Method of fabricating iridium-based materials and structures on substrates, and iridium source reagents therefor | Thomas H. Baum | 2002-01-22 |
| 6337148 | Copper source reagent compositions, and method of making and using same for microelectronic device structures | Thomas H. Baum | 2002-01-08 |
| 6331211 | Method and apparatus for forming low dielectric constant polymeric films | Thomas H. Baum, Ralph Carl, Edward A. Sturm | 2001-12-18 |
| 6204402 | Indium source reagent compositions, and use thereof for deposition of indium-containing films on substrates and ion implantation of indium-doped shallow junction microelectronics structures | Thomas H. Baum | 2001-03-20 |
| 6123993 | Method and apparatus for forming low dielectric constant polymeric films | Thomas H. Baum, Ralph Carl, Edward A. Sturm | 2000-09-26 |
| 6102993 | Copper precursor composition and process for manufacture of microelectronic device structures | Gautam Bhandari, Thomas H. Baum | 2000-08-15 |