Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341037 | Temperature control apparatus for semiconductor processing equipment, and temperature control method for the same | Kui Zhao, Hiroshi Iizuka, Dee H. Wu, Tuqiang Ni | 2025-06-24 |
| 12309891 | Control method for multi-zone active-matrix temperature control in plasma processing apparatus | Tuqiang Ni, Dee H. Wu, Sha Rin | 2025-05-20 |
| 12094693 | Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring | Jiangtao Pei, Zengdi Lian, Dee H. Wu | 2024-09-17 |
| 11676803 | Liner assembly for vacuum treatment apparatus, and vacuum treatment apparatus | Tuqiang Ni | 2023-06-13 |
| 11621149 | Corrosion-resistant gas delivery assembly, and plasma processing apparatus | Yilong Su, Miaojuan Chen | 2023-04-04 |
| 11387084 | Uniform pumping dual-station vacuum processor | Yuejun GONG, Tuqiang Ni, Dee H. Wu, Ning Zhou, Kelvin Chen | 2022-07-12 |
| 11371141 | Plasma process apparatus with low particle contamination and method of operating the same | Tuqiang Ni, Shenjian Liu, Xingjian CHEN, Lei Wan | 2022-06-28 |
| 11348763 | Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus | Zengdi Lian, Dee H. Wu, Yu Guan, Xingjian CHEN, Shenjian Liu +1 more | 2022-05-31 |