Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12309891 | Control method for multi-zone active-matrix temperature control in plasma processing apparatus | Tuqiang Ni, Rason Zuo, Dee H. Wu | 2025-05-20 |
| 12094695 | Multi-zone temperature control plasma reactor | Tuqiang Ni, Steven Lee, Zhou Xiaofeng, Mei Rui | 2024-09-17 |
| 12046458 | Multi-zone heating apparatus, bottom electrode assembly, plasma processing apparatus, and temperature adjusting method | Jie Du | 2024-07-23 |