Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094693 | Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring | Jiangtao Pei, Rason Zuo, Dee H. Wu | 2024-09-17 |
| 11348763 | Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus | Rason Zuo, Dee H. Wu, Yu Guan, Xingjian CHEN, Shenjian Liu +1 more | 2022-05-31 |