Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261012 | Plasma treatment apparatus, lower electrode assembly and forming method thereof | Tuqiang Ni, Sheng Guo, Xiang Sun, Guangwei Fan, Kuan-Yu Yang +2 more | 2025-03-25 |
| 12123089 | Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus | Jiao DUAN, Sheng Guo, Xiang Sun | 2024-10-22 |
| 11371141 | Plasma process apparatus with low particle contamination and method of operating the same | Tuqiang Ni, Rason Zuo, Shenjian Liu, Lei Wan | 2022-06-28 |
| 11348763 | Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus | Zengdi Lian, Rason Zuo, Dee H. Wu, Yu Guan, Shenjian Liu +1 more | 2022-05-31 |