Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354837 | Plasma processing method and plasma processing apparatus | Takahiro Yonezawa, Shinya Ishikawa, Koki Tanaka, Sho Kumakura | 2025-07-08 |
| 12334331 | Substrate processing method and plasma processing apparatus | — | 2025-06-17 |
| 12334343 | Substrate processing method and substrate processing system | Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda | 2025-06-17 |