Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412750 | Plasma processing method and plasma processing apparatus | Shinya Ishikawa, Kenta ONO | 2025-09-09 |
| 12334343 | Substrate processing method and substrate processing system | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Yoshihide Kihara | 2025-06-17 |
| 12230505 | Etching apparatus | Akihiro Tsuji, Hikaru Watanabe | 2025-02-18 |