Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431335 | Substrate processing method and substrate processing apparatus | Yuta NAKANE, Sho Kumakura | 2025-09-30 |
| 12412750 | Plasma processing method and plasma processing apparatus | Kenta ONO, Masanobu Honda | 2025-09-09 |
| 12354837 | Plasma processing method and plasma processing apparatus | Takahiro Yonezawa, Takayuki Katsunuma, Koki Tanaka, Sho Kumakura | 2025-07-08 |
| 12334343 | Substrate processing method and substrate processing system | Toru Hisamatsu, Takayuki Katsunuma, Yoshihide Kihara, Masanobu Honda | 2025-06-17 |