Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431335 | Substrate processing method and substrate processing apparatus | Yuta NAKANE, Shinya Ishikawa | 2025-09-30 |
| 12354837 | Plasma processing method and plasma processing apparatus | Takahiro Yonezawa, Takayuki Katsunuma, Shinya Ishikawa, Koki Tanaka | 2025-07-08 |
| 12308241 | Plasma processing method and plasma processing apparatus | Masahiro Tabata | 2025-05-20 |