Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325919 | Apparatus for processing substrate | — | 2025-06-10 |
| 12308241 | Plasma processing method and plasma processing apparatus | Sho Kumakura | 2025-05-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325919 | Apparatus for processing substrate | — | 2025-06-10 |
| 12308241 | Plasma processing method and plasma processing apparatus | Sho Kumakura | 2025-05-20 |