Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334343 | Substrate processing method and substrate processing system | Takayuki Katsunuma, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda | 2025-06-17 |
| 12300467 | Plasma processing method and plasma processing apparatus | Manabu Oie, Takanori BANSE | 2025-05-13 |